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SQC-310C 薄膜沉积控制器
SQC-310C 薄膜沉积控制器
| 类型 | SQC-310 | SQC-310C |
|---|---|---|
| 测量 | ||
| QCM 输入 | 2 (4 optional) | 4 |
| 测量频率范围 | Adjustable: 1.0 MHz minimum 6.5 MHz maximum | Adjustable: 1.0 MHz minimum 6.5 MHz maximum |
| 频率分辨率 (1) | ± 0.012 Hz | ± 0.012 Hz |
| 厚度和速率分辨率/测量 (2) | ±0.015 Å | ±0.015 Å |
| 频率稳定性 | ± 2 ppm total, 0 to 50C | ± 2 ppm total, 0 to 50C |
| 测量周期 | 0.10 to 1.0 s (adjustable) | 0.10 to 1.0 s (adjustable) |
| 速率显示 | 0.01 Å/sec | 0.01 Å/sec |
| 控制 | ||
| 存储 | 100 processes, 1000 layers, 50 films | 100 processes, 1000 layers, 50 films |
| 控制输出 | 2 (4 optional) | 4 |
| 输出信号 | ± 0 to 10 VDC, 15 bits | ± 0 to 10 VDC, 15 bits |
| 数字输入/继电器 | 8/8 (16/16 optional) | 16/16 |
| 数字输入 | 5 VDC non-isolated | 5 VDC non-isolated |
| 继电器 | SPST Form 1A, 30V, 2A max | SPST Form 1A, 30V, 2A max |
| 接口 | Standard RS-232 and USB (RS-232 and Ethernet optional) | Standard RS-232 and USB (RS-232 and Ethernet optional) |
| 远程电源控制 | Optional (IPN 782-900-017) | Optional (IPN 782-900-017) |
| 显示器 | ||
| 类型 | 1/4 VGA 320 x 240 active matrix color LCD | 1/4 VGA 320 x 240 active matrix color LCD |
| 图表 | Rate, deviation, power or full screen numeric | Rate, deviation, power or full screen numeric |
| 一般 | ||
| 功率 | 100-240 VAC, 50/60 Hz, 25W | 100-240 VAC, 50/60 Hz, 25 W |
| 合规性 | CE, RoHS | CE, RoHS |
| Windows® 软件 | Included | Included |
| 壳体/安装 | 5 1/4” half-rack | 5 1/4” half-rack |
(1) 0.25 秒测量间隔的分辨率
(2) 工具/密度 = 100/1，基础频率= 6 赫兹，0.25 秒测量间隔
